The Institute of Microelectronics of the Chinese Academy of Sciences will boost the research and development of advanced lithography process of Yuexin Semiconductor

Recently, Wei Yayi and Su Yajuan, director of the Computational Lithography R&D Center of Guangdong Greater Bay Area Integrated Circuit and System Application Research Institute, a national high-end technical talent expert, and a researcher of the Institute of Microelectronics of the Chinese Academy of Sciences, and Su Yajuan, visited Yuexin semiconductor.

The sudden outbreak of COVID-19 in 2020 is changing the way people live and work in an unprecedented way, and has had a certain impact on the global economy. The new generation of information technology plays an important role in the prevention and control of the epidemic, which also makes the cornerstone of the information industry – the chip industry once again focused on the spotlight of the people across the country. my country’s integrated circuit market demand is huge, but the overall technology and manufacturing process are far from foreign countries. The importance of mastering international advanced manufacturing technology is self-evident.

Facing the rapidly developing chip market, Yuexin Semiconductor will continue to invest more in the research and development of advanced process technology while accelerating the release of production capacity. As the bottleneck of advanced manufacturing process, lithography needs to be overcome first. In this cooperative investigation, Professor Wei started from the current lithography process requirements for integrated circuit manufacturing, introduced and analyzed the development trend of the current lithography process in detail, and systematically reviewed the key elements and connection relationships of the lithography process modules. Combing, combined with the characteristics of Yuexin Semiconductor’s current technology nodes, clarified the problems and risks that may be encountered in the process, and gave corresponding technical solutions. At the symposium, the lithography engineers of Yuexin Semiconductor did not forget to have face-to-face in-depth exchanges with Professor Wei and his team on the problems encountered by the fab in the actual production process research and development process, and the academic exchange atmosphere was strong.

The industry-university-research cooperation between the Institute of Microelectronics of the Chinese Academy of Sciences and Yuexin Semiconductor is a great encouragement to Yuexin and Yuexin people. In the future, Yuexin Semiconductor will accelerate the research and development of advanced process technology and the further release of production capacity, and contribute to the healthy development of China’s semiconductor industry chain.

The Links:   T640N14TOF LM64C149